摘要
介绍日本20世纪80年代的新产品二维PSD器件“光位敏器”(Position Sensitive Detec-tors)以及LD“半导体激光器”(Semiconductor Laser Detectors),对二维PSD的工作原理进行了分析,讨论了由二维PSD和LD组成的“光-位置传感器”在两平面(二维)平行度测量的可行性,并对由二维PSD-LD组成的“光-位置传感器”在其他领域的应用作了有意的探讨。
A new product position detectors(PSD) and semiconductor laser detectors (LD) in 1980 Japan is introduced. This paper analyzes principle of PSD and LD. A possibility that light-position sense detectors composed PSD - LD measures hardness is discussed. Two-dimensional type PSD dimensional in two plane in measure in the field of measuring hardness.It also gives application of light-position sense detectors in other filed.
出处
《煤矿机械》
北大核心
2003年第10期47-49,共3页
Coal Mine Machinery
关键词
二维PSD器件
二维平行度
半导体激光器
测量系统
two-dimensional type PSD
two-dimensional semiconductor
laser detectors (LD)
measure system horizontal suribey
