DMY-1型膜厚测量仪的原理与设计

Principle and design of the DMY-1 film thickness measuring instrument

介绍了ＤＭＹ－１型膜厚测量仪的原理与设计，给出了不同情况下膜层厚度测量公式，并对该仪器进行了实验，该仪器的测量精度：对于较薄膜为±２ｎｍ，对一般膜层为被测厚度的±２％～±５％。

This paper describes the principle and design of the DMY-1 film thickness measuring instrument. Equations for film thickness measurement under different conditions are presented. Experiments were made with this instrument, providing an accuracy of ±2 nm for thinner film and ±2% -±5 % of thickness for thick film.