摘要
介绍了上海交通大学电磁微电机的研究、设计、制造技术及应用现状。
Research and development achievements on electromagnetic micromotor by Shanghai Jiao Tong University are summarized in the paper, including its structural design, electrical control and microfabrication techniques.
出处
《信息与电子工程》
2003年第3期71-74,共4页
information and electronic engineering
基金
国防科技基础研究基金资助项目(41305010301)