摘要
The co-effect of transmitted power fluctuation and system nonlinearity produce deviations in scatterometer measurement results . An internal calibration method to deal with this problem is proposed. The method can result in more precise scatterometric measurements in a wide range. The basic principle of the method is combining real-transmitted-power detection with the calibration of system nonlinearity. A practical scheme to implement the method is also presented, which is developed based on a special designed mechanism of a microwave radiometer-scatterometer combined system.
The co-effect of transmitted power fluctuation and system nonlinearity produce deviations in scatterometer measurement results . An internal calibration method to deal with this problem is proposed. The method can result in more precise scatterometric measurements in a wide range. The basic principle of the method is combining real-transmitted-power detection with the calibration of system nonlinearity. A practical scheme to implement the method is also presented, which is developed based on a special designed mechanism of a microwave radiometer-scatterometer combined system.
