基于四相检测技术的微电容传感器

Micro-capacitance sensor based on a four-phase detection technique

一种基于四相检测技术的电荷转移式微电容传感器,具有很强的消除杂散电容影响的能力,适用于被检测对象电容值小于1pF的场合,分辨力达1fF,灵敏度高于1V/pF,并能输出4～20mA的电流。其优良的性能和低廉的价格,使得微电容传感器的广泛推广应用成为可能。

A charge transfer microcapacitance sensor,which is based on a fourphase detection technique, has a good strayimmune function and is suitable for the case where the capacitance value to be measured is less than 1?pF. It has a high resolution of 1?fF and a sensitivity higher than 1?V/pF. It can also output an industrial standard current of 4～20?mA.The microcapacitance sensor is possible to be wide spread for its good performance and low cost. 