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微机电系统(MEMS)的干涉测量方法的研究进展

The study of measuring MEMS by interferometry method
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摘要 目前大量的机械系统中应用了微电子机械设备 ,从而对微机电系统 (MEMS)的测量提出了新的要求。 Recent technological trends based on miniaturization of mechanical devices to the microscopic scale,have lead to the development of MEMS.In turn,MEMS require the use of state-of-art test and measurement methodologies.In this paper,we discuss test methods for MEMS by using interferometry.
作者 吕捷 王鸣
机构地区 南京师范大学物理科学与技术学院
出处 《激光杂志》 CAS CSCD 北大核心 2003年第5期4-6,共3页 Laser Journal
关键词 微机电系统 MEMS 干涉测量 测量方法 激光干涉 光干涉平台 MEMS,measurement,interferometry
分类号 O436.1 [机械工程—光学工程]
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参考文献15

  • 1S Donati, M Norgia, V Annovazzi Lodi, A. Merlo. Measurement of MEMS Mechanical Parameters by Injection Interferometry.IEEE, 2000,89 - 90.
  • 2Clristian Rembe, Matthew Hart etc. Stroboscopic Interferometer with Variable Magnification to Measure Dynamics in an Adaptive - Optics Micromirror. IEEE, 2000,73 - 74.
  • 3Glenn F. LaVigne and Sam L. Miller. A Performance Analysis System for MEMS using Automated Imaging Methods. International Test Conference. Paper, 1998,17(3) :442 - 447.
  • 4Dennis M. Freeman. Using Video Microscopy to Characterize Micromechanical Systems. IEEE, 1998.
  • 5J Wylde and T j Hubbard. Measurement of MEMS Displacements and Frequencies Using Laser Interferometry. Proceeding of file IEEE Canadian Conference on Electrial and Computer Engineering Shaw Conference, Edmonton, Alberta, Canada May 1999,9- 12.
  • 6C J Tay, C Quan, S H Wang, H M Shang. Determination of a micromirrer angular rotation using laser interferometric method. Optics Communications,2001,195:71 - 77.
  • 7Jamed L. Blackslure and Shamachary Sathish. Characterization of MEMS Transducer Performance Using Near- Field Scanning Interferometry. IEEE Transation on Ultrasonics Ferroelecthicsand Frequency Control, May 2002,4.9 (5).
  • 8Cosme Furlong and Ryszard J. pryputniewicz. Characterization of shape and deformation of MEMS by quantitative opto - electronic metrology techniques. Proceeding of SPIE,2002.1,4778.
  • 9Gordon C. Brown Laser interferometric methodologies for characterizing static and dynamic behavior of microelectromechanical system (MEMS), Ph. D. Dissertation ISBN 059967475X, Source: Dissertation Abstracts International Volume:61 - 62, section B,1041.
  • 10Gordon C. Brown and Ryszard J. Prypumiewicz. Holograpluc microscope for measuring displacement of vibrating microbeam using time- averaged, electro- optic holography.Opt. Eng, May 1998,37 : 1398 - 1405.
激光杂志
2003年 第5期

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