微空心阴极放电作大体积辉光放电电子源的模拟研究

Simulation of microhollow cathode discharge as electrons resource for large volume glow discharge

基于MATLAB与VC + +混合语言 ,采用MonteCarlo模拟对高气压下亚毫米级微空心阴极放电 (MHCD)在第三电极牵引下电子的运动过程进行了研究 ,计算出不同电压、不同的尺寸结构下 ,电子的空间分布和被牵引出MHCD的电子能量分布。从理论上分析了MHCD结构要求 。

In this paper,the electron motion towed by the third electrode in a submillimeter level microhollow cathode discharge is investigated under high pressure by Monte Carlo simulation.Some swarm parameters have been obtained such as the electron density distribution and the energy and spatial distribution of the electrons towed out under the different voltage and dimension of the microhollow cathode.In theory,we analysed the effect of the voltage and dimension of the microhollow cathode on the energy and spatial distribution of the electrons towed out.