微梁谐振器高阶振动时的挤压薄膜阻尼效应

Squeeze film damping effects on a beam-shaped micro resonator at high excited frequency

研究了在微梁谐振器结构中 ,梁作高阶振动时挤压气体薄膜的阻尼效应 .采用无量纲化法、模态分析法和摄动法对可压缩雷诺方程进行线性化 ,求得在空气压力和外加电载荷激励作用下梁振动的共振频率变化比和品质因子等动力特性的变化情况 .结果显示这些特性参数都可以用两个与梁的尺寸有关的无量纲参数表示 .

The squeeze film damping effects on beam shaped micro resonator was studied. The methods of non dimensionalization, modal analysis and perturbation parameters were applied to linearize the compressible Reynolds equation. The dynamic characteristics of the microstructure were obtained. The results show that these characteristics can be written as a function of two dimensionless parameters dependent on the sizes of the microstructure.