摘要
随着科学技术的不断进步,人们对温度信息获取的手段提出了新的要求,对温度传感器超小型化的要求越来越迫切,薄膜传感器的出现满足这一要求。薄膜温度传感器由于其优异的性能,在工业生产中越来越得到广泛应用。本文介绍了薄膜温度传感器的特点、种类、应用、测温机理、膜系及其主要制备工艺等,并探讨了薄膜热敏电阻、薄膜热电偶的标定方法,最后论述了温度传感功能薄膜的国内外发展现状及其目前需要解决的关键技术。
The latest progress in the development of thin film temperature sensors with increasingly reduced size was reviewed. Discussion covers various aspects of the sensor, including its operating principle, its strengths and weaknesses, its fabrication technologies, its technical features, and its applications as well as the technical problems to be solved. Besides, calibrations of thermister and thermal-couple were also discussed.
出处
《真空科学与技术》
CSCD
北大核心
2003年第5期334-339,346,共7页
Vacuum Science and Technology
关键词
温度传感薄膜
功能薄膜
热电阻
热电偶
膜系
Thin-film temperature sensor,Functional film,Thermistor,Thermocouple,Layer structure
