摘要
利用静电贴膜技术在MCP输入面制备了4nm厚Al2O3非晶态电子透射膜,此工艺不造成MCP通道壁内表面碳污染。探讨了贴膜与气体辉光放电的关系,测量了MCP电子透射膜的电子透过特性和离子阻挡特性。实验表明,4nm厚Al2O3非晶态电子透射膜能有效地透过电子,阻止反馈离子。
Amorphous Al2O3 electron transmission films,4 run thick, were successfully coated by electrostatic film posting on the front surface of a microchannel plate (MCP) with no observable carbon contamination in its inner wall of the pores. Various factors of interest, including influence of posting on gas glow discharge, properties of both electron transmission and ion feedback prevention of the film were experimentally studied. The results show that the 4 ran thick Al2O3 film has a high electron transmission and provides effective ion feedback blocking.
出处
《真空科学与技术》
CSCD
北大核心
2003年第5期359-361,共3页
Vacuum Science and Technology
基金
国防科技重点基金(No.2.2
3.1)资助项目
关键词
微通道板
电子透射膜
像管
MicroChannel plate, Electron transmission film, Image tube
