摘要
设计并制作了一种可在大气下工作的栅结构电容式微机械加速度传感器,并对其空气滑膜阻尼特性进行了研究.测试结果表明该种结构机械品质因子Q值在大气压下能达到504.这种具有高Q值的栅形电容检测结构可以应用到微机械陀螺的检测模式,它无需真空封装,可以在大气环境下工作,且灵敏度提高.对陀螺原型的测试结构表明,其在大气下检测模态的Q值可以达到715.
The authors design and fabricate a new bar capacitive micro\|mechanical accelerometer. Its air slide\|film damping is studied. The test results indicate that the quality factor Q of the bar structure accelerometer is 504. The bar capacitive testing structure having high Q can be used in the tesing mode of micromechanical gyroscope which is not necessary to be encapsulated in the vacuum, can work at the atmosphere having high Q.The testing result of the gyroscope having bar structure indicate that the Q can reach 715 in the atmosphere environment.
出处
《工程设计学报》
CSCD
2003年第5期271-274,共4页
Chinese Journal of Engineering Design
基金
国家"863"计划资助项目(2002AA404410).
关键词
滑膜阻尼
电容检测
栅形结构
air slide-ilm damping
capacitive test
bar structure
