称重法晶体生长的等径控制理论

Theory of Automatic Diameter Control with Weighing Method for Growth of Single Crystals

本文研究了在称重法等径控制系统中炉温波动对生长晶体直径的影响,导出了最大直径起伏的数学表达式,分析了直径起伏与系统参数、材料参数以及工艺参数之间的关系,为进一步提高晶体质量和等径度提供了理论依据。

In the present work the effect of the furnace temperature flu-ctuation on the diameter of the growing crystal in the automatic diamenter co-ntrol (ADC) system with the weighing method is studied,the mathematicalexpressions for the maximum diameter fluctuation are derived.Furthermore,We have also analyzed the relationship between the diameter fluctuation andthe system parameters,the material parameters as well as the technical para-meters,All of these provided the theoretical basis for improving the isometricand the quality of the crystal.