负压吸附式环形气垫导轨的计算方法

Method of calculating negative pressure-and-adsorption air cushion annular slide

根据负压吸附导轨的工作原理,利用流体力学的性质,系统地建立了导轨的承载能力和气膜厚度的数学模型,得出4个结构参数、气源气压与承载能力和气膜厚度的关系。最后通过实验证明了该导轨气膜厚度在1～3μm时,刚度稳定,最大变化量约为10%,且计算刚度与试验刚度的误差小于12%,能够适用于高精密器械的移动元件或承载元件。

Negative pressure adsorption slide is a new air static pressure slide widely used for high precision, high speed and light load applications. A systematical mathematic model has been established in the light of the operating principle, and hydromechanics load-carrying capacity and gas film thickness of the slide. Some conclusions are drawn on four structural parameters, gas source pressures, load-carrying capacity and gas thickness, and finally, the slide's performance was verified through experiments. When gas thickness varies in 1～3 μm, the load-carrying capacity is stable ,maximal variation is about 10%, and the error between calculating stiffness and experimental stiffness is less than 12%. So, this slide can be used for mobile components or bearing components of precise appliances.