CVD制备炭/炭复合材料过程中天然气利用率影响因素研究

Affecting factors of utilization rate of carbon source gas in industrial production of carbon/carbon composites by CVD

研究了样品密度、装炉方式、工艺参数、热场等因素对化学气相沉积制备炭/炭复合材料过程中天然气利用率的影响。结果表明,在工艺参数一定的前提下,天然气利用率随样品密度增大而降低;且在化学气相沉积炉内,密度为(0.45±0.05)g/cm3的样品采用样品与气流方向平行的装炉方式,在温度1 065℃,CH4和N2通气量分别为20 m3/h和8 m3/h、炉压2.9 kPa条件下,天然气利用率最高可达48.15%。

The effects of sample density,process parameters and heat field on the gas utilization rate of carbon/carbon composites by chemical vapor deposition were studied.The results showed that the natural gas utilization rate decreases with the increase of sample density.The sample with a density of(0.45±0.05)g/cm3 assembled in the chemical vapor deposition furnace that is parallel to the direction of the air flow,under 1 065℃,p=2.9 kPa with the flow rate of CH4 to N2 of 20∶8,exhibits the maximum natural gas utilization rate of 48.15%.