摘要
采用真空蒸镀方法 ,利用液体衬底在沉积过程中的扩散 ,形成了沉积在玻璃表面的楔形铝薄膜 ,并研究了它的结构和I V特性 .实验表明 ,楔形铝薄膜的斜率仅 10 - 6 — 10 - 7,具有与一般非平整薄膜不同的I V特性 ,其非平整效应不能用普通的非平整薄膜的RRN理论模型来解释 .
A wedge-shaped aluminum thin film system, deposited on glass surfaces by a vapor deposition method, has been fabricated. By using the expansive and movable behaviours of silicone oil drops, the Al films are quenched gradually by the silicone oil during the deposition process. An anomalous wedge-shaped structure with a slope of 10(-6)-10(-7) spontaneously forms. The I-V characteristic of the system has been studied and its rough effect cannot be interpreted as RRN model of the normal rough thin films.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2001年第10期1991-1995,共5页
Acta Physica Sinica
基金
国家自然科学基金 (批准号 :198740 16)~~
