BC_2N薄膜的柱状生长及生长机理

SYNTHESIS AND MECHANISM OF BC_2N THIN FILMS IN STALK-LIKE GROWTH

应用热丝辅助等离子体化学气相沉积法 (CVD)合成了表面呈柱状的BC2 N薄膜 ,X射线、红外及X射线电子能谱分析表明 ,薄膜的化学组分主要为BC2 N ,B ,C和N原子间互相结合成键 .扫描电镜观察到 ,薄膜表面形貌呈排列整齐、取向一致的柱体 ,并且发现这种生长方式与沉积参数密切相关 .最后从结合能方面讨论了柱状BC2 N的生长机理 .

The BC2N thin films in stalklike growth have been deposited by hot filament assisted and rf plasma chemical vapor deposition (CVD). It was shown that the composition of the thin films mainly consists of BC2N, in which B, C and N were combined in atomic bonds. And the surface of the film took the shape of stalks, they were in regular arrangement with a uniform orientation observed with scanning electron microscopy. In addition, we found this kind of growth had intimate relation with the deposition parameters. Finally, we analyzed the growth machanism of the stalklike BC2N.