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多孔型铝阳极氧化膜(AAO)的形貌及相结构分析 被引量:5

Analysis on the Shape and Structure of Porous Aluminum Anodic Oxide(AAO) Film
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摘要 在相同的工艺条件 ,分别用磷酸、磷酸与草酸混合溶液为电解液制备了多孔铝阳极氧化膜(AAO) ;用TEM观察了膜的形貌 ,表明膜的表面有排列较规则、具有一定准周期性的微孔 ,微孔的孔径大约为 75nm ;对于在磷酸与草酸混合酸中氧化的工艺 ,氧化膜较厚 ,通过扫描电镜观察 ,其膜厚在 5 0 μm左右 .X射线衍射分析表明 ,在低于 60 0℃热处理的条件下铝箔表面的阳极氧化膜基本上是以无定形态存在 ,经 90 0℃热处理无定形氧化铝开始结晶出γ -Al2 O3。 In the same process conditions, porous Anodic Aluminum Oxide(AAO) films have been prepared in phosphoric acid, mixture of phosphoric acid and oxalic acid separately. TEM observation of the aluminum film indicates that pores arrange in a quasi-periodic way. In the film, the nanopore is about 75nm. For the sample anodized in mixed acids, the film is relatively thick. Under observation with SEM, the thickness of the film is about 50μm. X-ray Diffraction result indicates that the oxide film on the surface of aluminum is amorphous if annealing temperature is lower than 600℃. The amorphous aluminum begins to transform to γ-Al 2O 3 when they are annealed at temperature of 900℃. The amorphous film fabricated by this technology is comparatively steady.
出处 《昆明理工大学学报(理工版)》 2003年第5期52-55,共4页 Journal of Kunming University of Science and Technology(Natural Science Edition)
基金 国家自然科学基金 (项目编号 :5 0 1 6 1 0 0 2 ) 云南省自然科学青年基金 (项目编号 :2 0 0 1E0 0 0 7Q) 国家人事部 2 0 0 1年度博士后基金
关键词 多孔型 铝膜 AAO 显微结构 阳极氧化 制备方法 厚度 无定形态 anodic aluminum porous film aluminum film
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参考文献8

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