高过载低量程测试传感器的选择比较

The Application of MEMS Sensors in Dynamic Testing

在动态测试领域传感器高过载低量程一直是未能彻底解决的问题。本文在简单论述MEMS传感器原理的基础上,比较了MEMS传感器和传统工艺的压电传感器的特点,并进行了两类传感器在高过载低量程测量中的应用比较,得到了MEMS传感器能够较好完成高过载低量程测量要求的结论。

The problem of large-overload and narrow-range sensors in dynamic testing field has not been solved completely. Because of the piezoelectric sensors' common inhere defect in technology and structure, accumulation or leakage of charge will appear and thus result in the drift of the sensors' output when they received large overload drive. This phenomenon cant make the signal to return zero. Thus, some data in large overload environment can t redisplay the dynamic process of the environment. The MEMS sensors provide an effective way to slave the problem. The principle of the MEMS sensors is discussed and the application of MEMS Sensors in large-overload and narrow-range Testing is the highlight.