激光聚焦光斑形状对溅射产物角分布的影响

The affect of pulsed laser deposition upon angle distribution function

讨论了将线形聚焦光斑看作是点溅射的线性迭加时 ,对衬底平面上溅射产物角分布影响的推导 。

The derivation of the angle distribution of sputtering outcome is given when the line focusing spot is looked upon the linear adding. The results have proved that there are strong interactions among the particles in sputtering outcome.