蠕动爬行微电机械力-电耦合的致动特性分析

Analysis on the driving characteristic of a shuffle MEMS

对于以施加电场作为驱动的蠕动爬行微电机构 ,在柔韧薄板理论和电学物理基础上 ,通过考虑驱动元件在电场力作用下的几何非线性变形和与结构变形相关的电荷分布及电场力分布 ,建立了其驱动元件的非线性耦合模型。在此基础上 ,采用矩量法和增量有限元法相结合 。

Based on thin plate and electrical theories, this paper establishes a nonlinear coupling model of the element that is actuated by the electrical field in the shuffling MEMS, to which the geometrical nonlinear deformation, electric charge and electric field force distribution with relation to the deformation are taken into account. On account of above theories, the method of moment is adopted combining with the incremented finite element method and the characteristic relation between the shuffling displacement and controlling voltage is given by the bending deformation before the instability.