摘要
用粉末溅射方法制备了体添加型SnO_2-Pt薄膜材料。该材料不仅对CO气体有很高的灵敏度、良好的选择性和较低的工作温度,而且其电导在CO气体中有振荡现象。振荡波形除锯齿形、简谐波形外,还出现了“拍振”等更为复杂的波形,振荡频率可达5.2Hz。
The volumetric-additive SnO_2-Pt thin film as sample has been prepared. Experiment shows: in carbon monoxide condition, the film has high sensitivity and good selectivity, its operating temperature is lower and its conductivity possesses with oscillation. Besides sawtooth wave and harmonic wave, the oscillation waveform yet presents 'beat' and more complicate waves Oscillation frequency comes up to 5.2 Hz.
关键词
气敏器件
薄膜性质
半导体膜
溅射
Gas sensitive devicesr Property of thin films
Semiconductor films
Sputtering
