摘要
将笔者1981年提出的方法加以补充,对经典沉降公式进行了修正,得出了最低成 品率的计算公式及由不同集成度的集成电路成品率求洁净度级别的方法。
Replenishes the theoretical method proposed by the author in 1981 and revises the classic depositing formula. Gives the calculation formula of minimum finished product rate. Presents a method to determine cleanliness class by finished prroduct rate of IC at various integrated levels.
出处
《暖通空调》
北大核心
2003年第5期24-27,共4页
Heating Ventilating & Air Conditioning
关键词
集成电路
成品率
空气洁净度
洁净度级别
integrated circuit, finished product rate, cleanliness class
