摘要
采用溶胶-凝胶法制备了ITO薄膜,并对溶胶-凝胶法中Sn掺杂量、后续热处理温度以及热处理时间3种工艺参数对ITO薄膜可见光区透射率的影响进行了分析和研究。研究结果表明: w(Sn)掺杂量小于10 %时,ITO薄膜的透射率下降缓慢,掺杂量大于10 %后,薄膜的透射率急剧下降;随着热处理时间的延长,ITO薄膜的透射率直线型下降;热处理温度与ITO薄膜透射率呈曲线关系,热处理温度为500℃时,ITO薄膜的透射率出现最大值。
The preparation of ITO films by sol-gel method and the influence of Sn diffusion, heat-treatment temperature and time on the transmittance of ITO films were studied. Experimental results showed that the transmittance of ITO films decreased slowly when Sn diffusion was less than 10 %,but it decreased sharply when Sn diffusion was beyond 10 %; with the increase of heat-treatment time, the transmittance of ITO films decreased linearly;with the increase of heat-treatment temperature, the transmittance of ITO films increased significantly with the temperature up to 500℃ and then decreased.
出处
《中国表面工程》
EI
CAS
CSCD
2003年第5期27-29,32,共4页
China Surface Engineering
