WO_3-SiO_2纳米复合薄膜的制备与气致变色效应研究

Preparation of Nano Structured WO_3-SiO_2 Composite Films and Gasochromic Properties

以钨粉和正硅酸乙酯为原料 ,采用溶胶凝胶技术和旋转镀膜方法 ,在玻璃衬底上制备出了气致变色WO3 SiO2 纳米复合薄膜 .采用椭偏仪、场发射扫描电子显微镜 (FE SEM )、红外光谱仪以及可见光分光光度计等对不同温度热处理的WO3 SiO2 复合薄膜及WO3 薄膜的特性进行了分析 .研究结果表明 :掺杂SiO2 会使WO3 薄膜厚度增大 ,折射率下降 ,表面平整度降低 ,颗粒尺寸增大 ;经高温热处理的WO3 SiO2

Nano structured WO 3?SiO 2 thin films have been prepared using a sol-gel process with the starting tungsten powders and Ethyl silicate(TEOS) together with the spin coating method in this paper.Properties of the WO 3 and WO 3?SiO 2 composite films have been investigated with ellipsometer,FE?SEM,FTIR and spectrophotometer,respectively.Results reveal that the thickness of the WO 3 films increases with the adding of SiO 2,while refractive index of the films decreases,the grain of the films become bigger and the surface becomes rough.After high temperature treatment,the nano structured WO 3?SiO 2 films still have an excellent gasochromic properities.