基于像散的并行全场三维检测新方法

Whole-Filed 3-D Profile Detecting Method Based on Astigmatism

基于像散原理,提出了一种全场并行三维检测新方法,该检测方法利用微透镜阵列产生的二维点光源阵列来实现并行像散光路,实现了对测量表面的全场同步检测.利用像散特性曲线中的线性关系,实现在较大采样间距下获得较高的轴向分辨率.介绍了并行全场三维检测的测量原理,对像散光学系统的性能参数和影响因素进行了分析和讨论,并进行了可行性实验.实验结果中像散特性与理论分析是基本吻合的,表明像散法在并行三维检测中可以应用.

Based on astigmatic method, a nonscanning 3D profile detecting method was proposed. In the detecting method, a 2D light source array produced by the microoptic component is used to form parallel microastigmatism system. The wholefield detecting of measuring plane is realized simultaneously. By use of the linearity characteristic of the astigmatic system, the high axial resolution is achieved at a larger sampling interval. The measuring efficiency and accuracy are increased simultaneously. The construction and working principle of the noscanning 3D detecting system was studied, and the performance parameters and affecting factors of the astigmatic system were discussed. Experimental results were obtained, which accord with the theory analysis. It indicates that the astigmatic method is applicable in nonscanning 3D profile detecting.