摘要
利用表面微机械技术 ,成功制作了 1.3μm Si基 MOEMS可调谐光滤波器 .原型器件在 5 0 V的调谐电压下 ,调谐范围为 90 nm.该技术可以用于制作 1.3μm Si基可调谐光探测器 .
Optical filters capable of single control parameter based wide tuning are implemented and studied.A prototype surface micromachined 1 3μm Si based MOEMS (micro opto electro mechanical systems) tunable filter exhibits a continuous and large tuning range of 90nm at 50V tuning voltage.The filter can be integrated with Si based photodetector in a low cost component for coarse wavelength division multiplexing systems operating in the 1 3μm band.
基金
国家重点基础研究发展规划(No.G2 0 0 0 0 3 660 3 )
国家自然科学基金(批准号:9610 40 0 3 )
国家高技术研究发展计划 (No.2 0 0 2 AA3 12 0 10 )资助项目~~
