摘要
A windowed very small aperture laser (VSAL) source for use in high resolution near field optical data storage is fabricated.The windowed regions are introduced to avoid shorting the pn junction with metal coating and suppress the COD effect.It facilitates producing VSAL by simplified technology and improves the laser performance.A VSAL with 400nm small aperture is demonstrated by focused ion beam (FIB) and the output power is 0 3mW at 31mA.
报道了一种窗口型的用于高分辨率近场光学存储领域的极小孔激光器 .这种窗口结构的引入解决了出射端面处由于金属膜的存在而导致的 pn结短路问题 ,同时一定程度上抑制了激光器腔面处的 COD效应 .简化了极小孔激光器的工艺 ,降低了制备难度 ,提高了激光器的输出特性 .通过 FIB设备制备出了小孔大小为 4 0 0 nm,工作电流在 31m A时的出光功率约 0 .3m
基金
国家高技术研究发展计划资助项目 (No.2 0 0 2 AA3 13 0 60 )~~
