摘要
运用能量法分析了两端固支多层梁在静电作用下的弯曲情况及发生吸合现象时 ,梁中央的归一化位移 β和对应的吸合电压 VPI,得到了 β和 VPI的解析表达式 .用 Coventor软件中的 Co Solve EM模块进行了模拟 。
The relationship between applied voltage and deflection of the beams at pull in state is analyzed using the energy method.Two equations about normalized displacement and pull in voltage are developed.The obtained equations are verified by the CoSolveEM module in Coventor.Comparing the results for the analytical equations and those for Coventor shows that they agree with each other.
关键词
两端固支多层梁
能量法
挠度
吸合
doubly clamped multi layer beam
energy method
deflection
pull in
