摘要
分析了扭臂驱动结构的上电极端部位移与外加电压之间的关系 ,提出了一种具有倾斜下电极的驱动结构 ,并通过倾斜一定角度的 (111)硅片的各向异性腐蚀制作了倾斜下电极 .理论分析和实验结果表明 ,倾斜下电极的 pull-in电压几乎比平面下电极的 pull- in电压降低一半 .
The relation between the applied voltage and the displacement at the end of upper electrode is studied.The actuator with the slanted low electrode is proposed and fabricated with certain tilting angle (111) silicon.Theoretical analysis and experiment results indicate that the pull in voltage based on the slanted low electrode actuator is half of that based on the flat low electrode.
基金
国家 8 63计划 (No.2 0 0 2 AA3 12 0 2 3 )
国家自然科学基金 (批准号 :6993 70 10 )
吉林省科学计划(No.2 0 0 10 3 19)资助项目~~
关键词
微机械
光开关
扭臂
倾斜下电极
micromechanics
optical switches
torsion beam
slanted low electrode
