摘要
平面集成光波导器件因其基体不同,其制造技术各异。国际信息业的发展以每年翻一番的速率将持续下去。我国的互联网业务发展相对国际要滞后一些,但也有相似的发展规律。Si基平面集成光波导器件与Si工艺兼容,是国内外热门研发领域之一。
The various manufacture technique of intergrated planar optical waveguie device is introdued,the develop speed of foreign information industry is doubled every year,the domestic development law is similar but relative lag.The technologies both Si technigue and Si-base intergrated planar optical waveguide device are the hot subjects to be studied all over the world.
出处
《激光与红外》
CAS
CSCD
北大核心
2003年第5期390-391,共2页
Laser & Infrared