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微尺度热传导理论及金属薄膜的短脉冲激光加热 被引量:13

Theory of microscale heat transfer and short-pulse laser heating of thin metal films
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摘要 概述了微尺度热传导理论的几种模型及其求解方法。以金属薄膜的短脉冲激光加热为例,分析了固体材料在微尺度条件下的热响应特征,主要包括短脉冲激光加热条件下金属薄膜中的热平衡时间、薄膜中热传递的波动性特征和微尺度条件下热传递的尺寸效应;同时讨论了对流热损失对金属薄膜热行为的影响。 Theoretical models of microscale heat transfer and solving approaches are summarized.Microscale thermal responses of solid material are investigated with examples of short pulse laser heating of metal films ,including the analysis for thermal equilibrium time of metal film under short-pulsed laser heating,the wave characteristic of heat transfer in metals and the size effects.In addition,the effects of convective thermal losses on the thermal behavior of thin metal films are discussed.
出处 《微纳电子技术》 CAS 2003年第11期18-23,共6页 Micronanoelectronic Technology
基金 国家自然科学基金资助项目(10132010)
关键词 微尺度 热传导 金属薄膜 短脉冲激光加热 热平衡 对流热损失 microscale heat transfer metal film laser heating
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