微加工中的聚焦离子束直接写入技术

Direct writing techniques in microfabrication using focused ion beams

概述了聚焦离子束直接写入、离子研磨、离子注入及离子沉积技术。介绍了利用聚焦离子束技术在镀金硅片上研磨出的图案及制作出的各种纳米结构。聚焦离子束诱导沉积技术为将在各种科学工程领域应用的多种微结构的实现提供了可能,如聚焦离子束真空封装技术,它可被用来真空封装MEMS器件。

An overview of the FIB direct write technique,applications in milling,implantation,and deposition is given.An experiment of milling patterns on top of a gold-coated silicon wafer is carried out to study the FIB milling behavior.FIB has shown to be successful in fabricating a number of nanostructures.FIB-induced deposition shows the realization of a number of microstruc-tures that will find applications in various fields of science and engineering.A good example is the FIB-deposited vacuum encapsulations that can be used for vacuum sealing of MEMS devices.