单晶硅材料电火花加工试验研究

Experimental research on Electric-Discharge Machining of single crystal silicon

针对单晶硅材料的特点,研究单晶硅的电火花加工工艺对促进电火花加工技术在微机电系统中的应用有重要的意义。对单晶硅材料进行电火花加工工艺试验研究的结果表明,在一定的条件下,电火花加工工艺可成为单晶硅材料的一种较有效的加工方法。

Single crystal silicon is one of the most important materials in Micro Electro-Mechanical System (MEMS). Research on electric discharge machining (EDM) as a technique used for single crystal silicon are very significance to promote the development of EDM in MEMS. An experiment of Single crystal silicon EDM have been carried out in this paper. Experimental results show that EDM is a effective machining method to single crystal silicon.