摘要
MEMS是当今迅速发展的一门新兴学科。本文在对MEMS技术进行概述的基础上,列举了MEMS技术的应用,介绍了MEMS技术的发展前景。
To study the MEMS technology and promote its development concerns whether China can win its relevant status in the second run of the micro - electronic industry. The paper enumerates the application of the MEMS technology and presents its prospects from the summarization of the MEMS technology.
出处
《云南电大学报》
2003年第3期61-62,共2页
Journal of Yunnan Rty University