摘要
重点介绍了微型环型行波超声波电机的结构、行波的产生、椭圆运动的产生、驱动原理等,最后介绍了制作这种电机的实验结果。
The principle of the micro circular traveling wave ultrasonic motor is described mostly,which include the structure of the mo- tor,the principle of traveling wave,the principle of elliptical motion,the drive principle of the motor.Finally,the experiment result of the motor which works successflly in our lab is introduced.