微镜扭转-弯曲耦合变形静态特性分析

Torsion-Bending-Coupling Static Characteristics Analysis of a Torsion Micromirror

给出了仅考虑微镜扭转运动的静力学分析模型,在分析微镜扭转梁因非线性静电力引起弯曲变形的基础上,建立了静电驱动微镜扭转-弯曲耦合非线性静力学模型.2种模型的临界吸合电压、临界吸合转角以及微镜转角随电压的变化关系与试验结果对比表明:所建耦合静态模型更符合实际情况,微镜垂直方向的位移和微扭转梁宽度的变化对微镜的临界吸合电压和临界吸合转角影响显著.

The static characteristic model of a electrostatic torsion micromirror is illustrated. On the basis of bending analysis of a microbeam due to the nolinear electrostatic force, a new nonlinear mathematical model of a torsion micromirror, which considers the coupling effect of torsion and bending, is presented. The pullin voltages, pullin angles and torsion angels of both models varying with the applied voltages are compared with experimental results. It shows that the coupling model presented agrees with the testing results better than the uncoupling model, and the vertical deflection of the micromirror and width of a microbeam affect the static characteristics of a micromirror significantly. The coupling model is helpful to design and optimization of the mircromirror system.