等离子体化学气相沉积超硬薄膜

SUPER-HARD COATINGS BY PLASMA CVD TECHNIQUE Zhang Xuenong Dong Yuanzhang Xiong Chenglie

本文简述了PCVD技术的原理、特性、设备。并对其制备的TiN、TiC、Ti(C_xN_y)超硬膜进行了显微硬度和化学成份等分析,最后介绍了该项技术在冷挤压冲头上的应用实例。

The author briefly summarizes the principles, properties and equipment of PCVD technique. The paper also presents the investigation of microhardness, surface and fracture zone feature, crystalline structure and chemical composition of TiN, TiC and Ti (C_xN_y) super-hard coatings. Finally, the paper gives out application cases of the PCVD technique in the cold extrusion punch.