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Hardness Measurement and Evaluation of Thin Film on Material Surface 被引量：1

材料表面薄膜硬度的测试计算(英文)
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摘要 A method for hardness measurement and evaluation of thin films on the material surface was proposed. Firstly, it is studied how to obtain the force indentation response with a finite element method when the indentation is less than 100 nanometers, in which current nanoindentation experiments have not reliable accuracy. The whole hardness indentation curve and fitted equation were obtained. At last, a formula to predict the hardness of the thin film on the material surface was derived and favorably compared with experiments. A method for hardness measurement and evaluation of thin films on the material surface was proposed. Firstly, it is studied how to obtain the force indentation response with a finite element method when the indentation is less than 100 nanometers, in which current nanoindentation experiments have not reliable accuracy. The whole hardness indentation curve and fitted equation were obtained. At last, a formula to predict the hardness of the thin film on the material surface was derived and favorably compared with experiments.
作者 王林栋 李敏 张泰华 梁乃刚
出处 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2003年第1期52-58,共7页 中国航空学报（英文版）
基金 Chinese Academy of Sciences Foundation (KGCX1-11) National Natural Science Foundation of China(10 2 3 2 0 5 0 ) Min-istry of Science and Technology Foundation(2 0 0 2 CB412 70 6)
关键词 thin film material HARDNESS NANOINDENTATION finite element simulation thin film material hardness nanoindentation finite element simulation
分类号 TB43 [一般工业技术]
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参考文献9

  • 1李敏 粱乃刚 张泰华 王林栋.纳米压痕实验的三维有限元数值模拟研究[J].力学学报(已接收),.
  • 2Oliver W C, Pharr G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments [-J ]. J Mater Res,1992,7 (6): 1546- 1583.
  • 3Bhattacharya A K, Nix W D. Analysis of elastic and plastic deformation associated with indentation testing Of thin films on substrates[J]. Int J Solids Structures, 1988,24 (12) :1287- 1298.
  • 4Sun Y, Bell T, Zheng S. Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nanoindentation[J]. Thin Solid Films, 1995,258:198-204.
  • 5Tsui T Y, Joost Vlassak, William D. Nix, indentation plastic displacement field: Part I. The case of soft films on hard substrates[J]. J Mater Res 1999,14(6):2196-2203.
  • 6Tsui T Y, Joost Vlassak, William D. Nix, indentation plastic displacement field: Part Ⅱ. The case of hard films on soft substrates[J]. J Mater Res, 1999,14(6):2204-2209.
  • 7Takeshi Sawa, Yasushi Akiyama, Atsushi Shimamoto, and Kohichi Tanaka. Nanoindentation of a 10 nm thick thin film[J]. J Mater Res, 1999,14(6) : 2228-2232.
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同被引文献6

  • 1Bhattacharya A K, Nix W D. Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates [J]. Int J Solids Structures, 1988,24 (12) :1287-1298.
  • 2Sun Y, Bell T, Zheng S. Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nanoindentation[J]. Thin Solid Films. 1955,258:198-204.
  • 3Tsui T Y, Vlassak J, Nix W D. Indentation plastic displacement field: Part I. The case of soft films on hard substrates[J]. J Mater Res, 1999,14(6):2196-2203.
  • 4Tsui T Y, Vlassak J, Nix W D. Indentation plastic displacement field: part I. The case of hard films on soft substrates[J]. J Mater Res, 1999,14(6) :2204-2209.
  • 5Takeshi Sawa, Yasushi Akiyama, Atsushi Shimamoto, Kohichi Tanaka. Nanoindentation of a 10 nm thick thin film[J]. J Mater Res, 1999,14(6):2228-2232.
  • 6Cheng Y T, Cheng C M. Scaling approach to conical indentation in elastic-plastic solids with work hardening[J]. J Appl Phys, 1998,84(3) : 1284- 1291.

引证文献1

Chinese Journal of Aeronautics
2003年 第1期

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