摘要
本文介绍了硅尖的制备及其在不同领域的应用。硅尖的制备方法可与现代IC工艺兼容且易削尖 ,故比其它材料微尖更实用。
The fabrication of silicon tip and its application in different fields are introduced in the article. The method to fabricate silicon tip is compatible with modern IC technology; in addition, the silicon tip may be easy to sharp, so that it is more practical than other materials. It is believed that the application of silicon tip will be newly developed with the improvement of fabrication technology and other correlative technologies.
出处
《微电子技术》
2003年第5期60-64,共5页
Microelectronic Technology
关键词
硅尖
刻蚀
微加工技术
Silicon tip
Etch
Micro-processing
