大口径光学元件检测中的主要误差及其影响

Testing errors and its influence of the large aperture optical elements

使用 PSD作为大口径光学元件的质量评价标准 ,为保证检测系统的精度 ,标定了作为测试系统的大口径相移干涉仪的系统传递函数 ,并讨论了在对 ICF驱动器中所使用的光学元件进行检测时产生的两种主要误差 ,即 :由于放置倾斜导致的低频误差和由干涉条纹引入的高频误差。

The power spectral density is employed as a specification criterion of the large aperture optical elements because it can describe the fabrication quality of the optical elements in frequency domain. To guarantee the precision of the testing process, the transfer function of the testing system has been confirmed. Furthermore, the main errors appeared in the testing process and their influences have been discussed. The results show that the low frequency error, which is caused by the placement, affects the testing result greatly. And the high frequency error, which is caused by the interference, does not have more effect on the testing.