摘要
采用微波同轴耦合氧气放电产生高密度氧等离子体 ,经磁场约束后与一施加负偏压的金属板碰撞复合并反射 ,得到通量在 1 0 1 3～ 1 0 1 6 atoms·cm- 2·s- 1范围可控、动能约为 6～ 1 0 e V的中性氧原子束流。用双探针技术对生成的氧等离子体进行了诊断测量。
In order to simulate the errosion effects of low earth orbital atomic oxygen and study the modification effects of atomic oxygen with materials surface,an atomic oxygen beam with flux in 10 13 ～10 16 atom/cm 2·s and energy in 6～10eV has been developed by means of microwave coaxial coupling discharge of molecular oxygen plus magnetic confine and collision and reflection with a biased metal target. The produced oxygen plasma has been measured by double probe technique. The obtained oxygen beam has been calibrated by measuring the reaction rate of kaptan with the beam. The results shows that an atomic oxygen beam with flux in 2×10 16 atoms·cm -2 ·s -1 and energy in 6～20eV can be obtained by this facility.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2001年第2期228-232,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金!(5 97710 6 6 )资助项目
关键词
原子氧束流
高通量
氧等离子体
复合
磁约束
atomic oxygen beam
high flux
oxygen plasma
coaxial coupling
magnetic confine
