摘要
A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10 at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10 at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
基金
This work was supported by the Academician Fund of hongqing(No. 6795).
