带高速光窗口的16×16 CMOS-SEED交换芯片

Photonic switching chip of 16×16 CMOS-SEED with high speed optical windows

论述了一种带高速光窗口的 1 6× 1 6CMOS SEED交换芯片的设计及制作 .SEED像元光窗口阵列的大小为 1 0 μm× 1 0 μm ,间距为 2 5 0 μm ,光开关速率可达 1 0 ps量级 ,对其电逻辑和光调制特性进行了测试 ,并应用到 1 6× 1 6自由空间Crossbar光学交换实验系统中 ,实现了 1 6× 1 6光信号的Crossbar网络交换 .

The design and fabrication process of 16 ×16 CMOS-SEED photonic switching chip with high speed optical windows were introduced. The size of the SEED smart pixel optical window array was 10?μm× 10?μm with a pitch of 250?μm. The optical switch speed was up to 10?ps degree. The characteristic of electrical logic and light modulation was tested. The CMOS-SEED chip was used in 16×16 free space optical crossbar switching experiment system, and 16×16 crossbar switching function was implemented in our experiment.