期刊文献+

刻蚀波导粗糙面散射的矩量法数值分析 被引量:3

Analysis of the Scattering from an Etched Rough Surface Using a Moment Method
下载PDF
导出
摘要 用矩量法对刻蚀波导粗糙面的散射特性做出了精确的数值分析 基于MonteCarlo方法建立高斯粗糙面数学模型 ,证明矩量法在分析刻蚀波导散射问题时 ,是可以应用于不同起伏高度、不同入射角的一种精确而高效的数值方法 对不同起伏高度的两种偏振态 ,分别在小角度入射和大角度入射两种情况的随机散射特性应用矩量法做出了分析 并以基于二氧化硅波导的EDG器件为例 。 A numerical moment method is used to calculate and analyze the scattering from an etched rough surface of a slab waveguide. The rough surface is generated with a Monte Carlo method. It is shown that the present method is always effective and efficient for different standard deviations of Gaussian height distribution and different incident angles. The relation between the backscattering coefficients and the standard deviations of Gaussian height distribution is analyzed for both polarizations with small or large incident angle. The influence of the etched rough surface on the spectral response of an etched diffraction grating demultiplexer is considered as an example.
作者 宋军 何赛灵
出处 《光子学报》 EI CAS CSCD 北大核心 2003年第11期1312-1315,共4页 Acta Photonica Sinica
基金 浙江省科技计划重大项目 (项目编号 0 0 1 1 0 1 0 2 7)
关键词 粗糙面 散射 矩量法 Moilte CARLO方法 平面波导 刻蚀衍射光栅(EDG) Rough surface Scattering Method of Moments Monte Carlo method Planar waveguide Etching diffraction grating (EDG)
  • 相关文献

参考文献12

  • 1柯熙政,郭立新,吴振森.一维随机粗糙面后向增强效应的蒙特-卡罗方法研究[J].光学学报,1999,19(4):491-496. 被引量:10
  • 2盛钟延,何赛灵,何建军,方蕴.蚀刻衍射光栅波分复用器件的设计与模拟[J].光子学报,2001,30(5):567-571. 被引量:7
  • 3Lou S H, Tsang L, Chan C H, et al. Application of the finite element method to Monte Carlo simulations of scattering of waves by random rough surfaces with the periodic boundary condition. Journal of Electromagnetic Waves and Applications, 1991,5(8) :835 -855.
  • 4Savailis S, Frangos P, Jaggard D L, et al. Scattering from fractally corrugated surfaces with use of the extended boundary condition method. Journal of the Optical Society of American(A), 1997,14(2) :475 -485.
  • 5Rouvier S, Chenerie I. Ultra wide band electromagnetic scattering of a fractal profiles. Radio Science, 1997,32 ( 2 ) :285 - 293.
  • 6Kriezis E E, Pandelakis P K, Papagiannakis A G.Diffraction of a Gaussian beam from a periodic planar screen. J Opt Soc Am(A) ,1994,10:630 -636.
  • 7Ruimin C, James C. Analysis of scattering from rough surfaces at large incidence angles using a periodic-surface moment method. IEEE Transactions on Geoscience and Remote Sensing, 1995,33(5) :1206 - 1213.
  • 8Chen M F, Bai S Y. Computer simulation of wave scattering from a dielectric random surface in tow dimensions-culindrical case. Journal of Electromagnetic Waves and Applications, 1990,4(10) :963 - 982.
  • 9Vall-Llossera M, Duffo N, Camps A, et 02. Method of moments applied to the analysis of rough surfaces modeled by fractals. European Congress on Computational Methods in Applied Sciences and Engineering,2000, Sep. 11 - 14.
  • 10Jae W K, Joon S, Jang J. Optimized oxygen plasma etching polycarbonate for low-loss optical waveguide fabrication.Jpn J Appl Phys, 2001,40(5 ) :3215 - 3219.

二级参考文献11

  • 1郭立新.电磁散射的分形应用(硕士论文)[M].西安:西安电子科技大学,1993.20-25.
  • 2戚力彦.随机深粗糙表面的光散射及后向增强效应(硕士论文)[M].西安:西安电子科技大学,1996.1-12.
  • 3宋国乡.数值泛函及小波分析初步[M].郑州:河南科学技术出版社,1992.208-314.
  • 4刘贵忠.小波分析及其应用[M].西安:西安电子科技大学出版社,1991.30-32.
  • 5戚力彦,硕士学位论文,1996年,1页
  • 6郭立新,硕士学位论文,1993年,20页
  • 7宋国乡,数值泛函及小波分析初步,1992年,208页
  • 8刘贵忠,小波分析及其应用,1991年,30页
  • 9He J J,Electron Lett,1999年,35卷,9期,737页
  • 10He J J,IEEE J Lightwave Technol,1998年,16卷,3期,631页

共引文献15

同被引文献23

  • 1徐建强,王蕴栅,司书春,高成勇,云大真.三维形貌测量的扫描相移法研究[J].光子学报,2004,33(10):1210-1213. 被引量:11
  • 2曹楷,程兆谷,高海军.硅片表面球形粒子散射研究[J].光子学报,2006,35(4):517-520. 被引量:6
  • 3王少清,庄葆华,张文伟.基于朗伯定律重建光学三角法测位移原理公式[J].光学学报,1996,16(12):1802-1808. 被引量:15
  • 4徐敬波,蒋庄德,赵玉龙,宋康.多光束在分形粗糙表面散射的仿真[J].光子学报,2006,35(12):1925-1929. 被引量:5
  • 5玻恩M 沃耳夫E.光学原理[M].北京:科学出版社,1978..
  • 6何贡 陈允昌 等.计量测试技术手册[M].北京:中国计量出版社,1997.594-597.
  • 7Ulaby F T,Moore R K,Fung A K.Microwave Remote Sensing.New York:Addison-Wesley,1982.792~803
  • 8Lou S H,Tsang L,Chan C H,et al.Application of the finite element method to Monte Carlo simulations of scattering of waves by random rough surfaces with the periodic boundary condition.Journal of Electromagnetic Waves and Applications,1991,5(8):835~855
  • 9Savailis S,Frangos P,Jaggard D L,et al.Scattering from fractally corrugated surfaces with use of the extended boundary condition method.Journal of the Optical Society of American(A),1997,14(2):475~485
  • 10Rouvier S,Chenerie I.Ultra wide band electro-magnetic scattering of a fractal profiles.Radio Science,1997,32(2):285~293

引证文献3

二级引证文献10

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部