摘要
说明原椭偏谱仪不能直接测量膜厚,提出外加波长片后可以测量膜厚的2种方法.
It is shown that the conventional ellipsometer can not be used to measuring the films' thickness.To solve this problem,it is suggested thst two kinds of methods for measuring the thickness of thin films by addition of filter wavelength leaf.
出处
《云南大学学报（自然科学版）》
CAS
CSCD
2003年第6期515-517,共3页
Journal of Yunnan University(Natural Sciences Edition)
基金
国家自然科学基金资助项目(50162002).
