摘要
设计了磁控溅射 多弧镀膜机的微机控制系统 ,采用PLC可编程控制器与上位机进行数据传递和控制设备的控制方式。本微机控制系统中的真空镀膜机 ,设计了 3套孪生磁控、10套多弧和 8级工艺的过程控制 ,具有自动组合工艺和自控程序升级功能 ,从而实现多种工艺的镀膜要求。
This paper introduces a computer controlling system of coating equipment. The controlling method on data communication and controlling device between S7-300 and the operating computer was used. The vacuum coater includes 3 twinborn magnetron sputterings, 10 arcs and 8 degrees of procedures. The coating processes can be fitted together automatically and completed.
出处
《真空》
CAS
北大核心
2003年第6期24-26,共3页
Vacuum
