摘要
采用固体三氧化二硼,用热丝辅助化学气相沉积法在石墨衬底上沉积了掺硼金刚石涂层。用喇曼谱、扫描电镜及电导 温度关系研究了掺硼金刚石涂层的生长气压和掺硼浓度等主要工艺参数对涂层的形貌、结构及电学性能的影响和涂层的循环伏安特性。结果表明,石墨基金刚石涂层电极具有优良的电化学性能。
B-doped diamond films were grown on graphite substrates by hot filament assisted CVD method (HFCVD). The dopant was solid B_2O_3. Raman spectra, SEM and the film resistance measurement at different temperatures were carried out to check out the influence of growth parameters on the film structure and surface morphology as well as electrical property. Perfect electrochemical properties of diamond coating on graphite substrate was proved by cyclic voltammetry.
出处
《机械工程材料》
CAS
CSCD
北大核心
2003年第11期39-42,共4页
Materials For Mechanical Engineering
