一个集成电路工艺诊断实例

An Example on IC Process Diagnosing

介绍了一种计算机自动 PCM(process control module)工艺参数分析系统 ,可用于集成电路制造过程中的工艺诊断和分析 .在具体处理上应用了主成分分析方法 ,能够从大量数据中提取其统计特征 ,根据这一特征可找出造成工艺波动的关键因素 .从所给出的具体诊断实例来看 ,该方法能够得出一般人工诊断所不能得出的诊断结论 ,效果较好 ,是实施严格生产控制的有效工具 .

A computer analysis that deals with the PCM (process control module) parameters is introduced.Since the principal component analysis (PCA) is preferable for extracting information in the IC design field,this multivariate statistic tool is adopted in a similar way to get answers in IC process failure.After the characteristic of the tested PCM data is described by PCA,diagnostic conclusions for a process failure can be easily obtained.This method is illustrated by an example,which is proved successful.The PCA method thus is useful for further IC process diagnosing.