微机械构件的表面去粘着技术

The elimination of adhesion in micro-mechanical devices

由于尺寸的减小和需要产生弹性形变,微机械构件的表面力(表面张力、粘着力)成为影响系统性能的关键因素。本文介绍了造成微构件表面粘着的因素,从材料、工艺和设计等方面综述了减弱或去除微机械构件表面粘着力的七种技术,并对相关工作进行了总结和展望。

Because of small size and elastic characteristics,micro mechanical devices are highly susceptible to surface forces,which become the key influencing factors on their operating perfor-mance.Some mechanisms responsible for the adhesion in microsystem are introduced,then sever-al schemes to reduce the adhesion between suspended member and its substrate are reviewd.