激光驻波透镜聚焦原子束制作超微细图形研究

Study on making super micro-pattern by atom standing light wave lens

介绍将原子束激光准直技术和驻波聚焦沉积技术用于制作纳米级图形的基本原理和实验系统设计。研究了驻波透镜对原子束的聚焦特性 ,数值结果显示在原子束高度准直的情况下 ,原子束在置于焦平面处的基底上所沉积的条纹半高宽为 10nm左右 ,可以实现纳米级超微细图形的制作。

The basic principle and experimental system design for applying laser cooling and focused atomic beams technique to fabrication nano-patterns are introduced.The focusing properties of a standing wave(SW) lens for a well-collimated thermal atomic beam are studied through numerical simulation.The result shows that this type of SW.lens can be used for atomic nanofabrication(ANF).The FWHM of the focal line width deposited on the substrate at the focal plane of the thermal atomic beam is about 10 nm.